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Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications
Highly flexible, electrically conductive freestanding graphene membranes hold great promise for vibration-based applications. This study focuses on their integration into mainstream semiconductor manufacturing methods. We designed a two-mask lithography process that creates an array of freestanding...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147771/ https://www.ncbi.nlm.nih.gov/pubmed/35629859 http://dx.doi.org/10.3390/membranes12050533 |