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The effect of electron dose on positive polymethyl methacrylate resist for nanolithography of gold bowtie nanoantennas

Plasmonic structures, such as bowtie nanoantennas, may be used in Surface Enhanced Raman Spectroscopy (SERS). Nanoantennas can be employed to amplify the biomolecular and chemical reactions, which is useful for biomedical applications. The electric field created by nanoantennas are optimized when th...

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Detalles Bibliográficos
Autores principales: Campbell, Caroline, Casey, Abigail, Triplett, Gregory
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9157001/
https://www.ncbi.nlm.nih.gov/pubmed/35663762
http://dx.doi.org/10.1016/j.heliyon.2022.e09475