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Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates
There is currently much activity toward the integration of mid-infrared semiconductor lasers on Si substrates for developing a variety of smart, compact, sensors based on Si-photonics integrated circuits. We review this rapidly-evolving research field, focusing on the epitaxial integration of antimo...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9160057/ https://www.ncbi.nlm.nih.gov/pubmed/35650192 http://dx.doi.org/10.1038/s41377-022-00850-4 |
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author | Tournié, Eric Monge Bartolome, Laura Rio Calvo, Marta Loghmari, Zeineb Díaz-Thomas, Daniel A. Teissier, Roland Baranov, Alexei N. Cerutti, Laurent Rodriguez, Jean-Baptiste |
author_facet | Tournié, Eric Monge Bartolome, Laura Rio Calvo, Marta Loghmari, Zeineb Díaz-Thomas, Daniel A. Teissier, Roland Baranov, Alexei N. Cerutti, Laurent Rodriguez, Jean-Baptiste |
author_sort | Tournié, Eric |
collection | PubMed |
description | There is currently much activity toward the integration of mid-infrared semiconductor lasers on Si substrates for developing a variety of smart, compact, sensors based on Si-photonics integrated circuits. We review this rapidly-evolving research field, focusing on the epitaxial integration of antimonide lasers, the only technology covering the whole mid-to-far-infrared spectral range. We explain how a dedicated molecular-beam epitaxy strategy allows for achieving high-performance GaSb-based diode lasers, InAs/AlSb quantum cascade lasers, and InAs/GaInSb interband cascade lasers by direct growth on on-axis (001)Si substrates, whereas GaAs-on-Si or GaSb-on-Si layers grown by metal-organic vapor phase epitaxy in large capability epitaxy tools are suitable templates for antimonide laser overgrowth. We also show that etching the facets of antimonide lasers grown on Si is a viable approach in view of photonic integrated circuits. Remarkably, this review shows that while diode lasers are sensitive to residual crystal defects, the quantum cascade and interband cascade lasers grown on Si exhibit performances comparable to those of similar devices grown on their native substrates, due to their particular band structures and radiative recombination channels. Long device lifetimes have been extrapolated for interband cascade lasers. Finally, routes to be further explored are also presented. |
format | Online Article Text |
id | pubmed-9160057 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-91600572022-06-03 Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates Tournié, Eric Monge Bartolome, Laura Rio Calvo, Marta Loghmari, Zeineb Díaz-Thomas, Daniel A. Teissier, Roland Baranov, Alexei N. Cerutti, Laurent Rodriguez, Jean-Baptiste Light Sci Appl Review Article There is currently much activity toward the integration of mid-infrared semiconductor lasers on Si substrates for developing a variety of smart, compact, sensors based on Si-photonics integrated circuits. We review this rapidly-evolving research field, focusing on the epitaxial integration of antimonide lasers, the only technology covering the whole mid-to-far-infrared spectral range. We explain how a dedicated molecular-beam epitaxy strategy allows for achieving high-performance GaSb-based diode lasers, InAs/AlSb quantum cascade lasers, and InAs/GaInSb interband cascade lasers by direct growth on on-axis (001)Si substrates, whereas GaAs-on-Si or GaSb-on-Si layers grown by metal-organic vapor phase epitaxy in large capability epitaxy tools are suitable templates for antimonide laser overgrowth. We also show that etching the facets of antimonide lasers grown on Si is a viable approach in view of photonic integrated circuits. Remarkably, this review shows that while diode lasers are sensitive to residual crystal defects, the quantum cascade and interband cascade lasers grown on Si exhibit performances comparable to those of similar devices grown on their native substrates, due to their particular band structures and radiative recombination channels. Long device lifetimes have been extrapolated for interband cascade lasers. Finally, routes to be further explored are also presented. Nature Publishing Group UK 2022-06-01 /pmc/articles/PMC9160057/ /pubmed/35650192 http://dx.doi.org/10.1038/s41377-022-00850-4 Text en © The Author(s) 2022 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Review Article Tournié, Eric Monge Bartolome, Laura Rio Calvo, Marta Loghmari, Zeineb Díaz-Thomas, Daniel A. Teissier, Roland Baranov, Alexei N. Cerutti, Laurent Rodriguez, Jean-Baptiste Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates |
title | Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates |
title_full | Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates |
title_fullStr | Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates |
title_full_unstemmed | Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates |
title_short | Mid-infrared III–V semiconductor lasers epitaxially grown on Si substrates |
title_sort | mid-infrared iii–v semiconductor lasers epitaxially grown on si substrates |
topic | Review Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9160057/ https://www.ncbi.nlm.nih.gov/pubmed/35650192 http://dx.doi.org/10.1038/s41377-022-00850-4 |
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