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Pristine PN junction toward atomic layer devices
In semiconductor manufacturing, PN junction is formed by introducing dopants to activate neighboring electron and hole conductance. To avoid structural distortion and failure, it generally requires the foreign dopants localize in the designated micro-areas. This, however, is challenging due to an in...
Autores principales: | Xia, Hui, Luo, Man, Wang, Wenjing, Wang, Hailu, Li, Tianxin, Wang, Zhen, Xu, Hangyu, Chen, Yue, Zhou, Yong, Wang, Fang, Xie, Runzhang, Wang, Peng, Hu, Weida, Lu, Wei |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9167816/ https://www.ncbi.nlm.nih.gov/pubmed/35661682 http://dx.doi.org/10.1038/s41377-022-00814-8 |
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