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Ion-Beam Synthesis of Gallium Oxide Nanocrystals in a SiO(2)/Si Dielectric Matrix
A new method for creating nanomaterials based on gallium oxide by ion-beam synthesis of nanocrystals of this compound in a SiO(2)/Si dielectric matrix has been proposed. The influence of the order of irradiation with ions of phase-forming elements (gallium and oxygen) on the chemical composition of...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9182438/ https://www.ncbi.nlm.nih.gov/pubmed/35683695 http://dx.doi.org/10.3390/nano12111840 |