Investigation of Heater Structures for Thermal Conductivity Measurements of SiO(2) and Al(2)O(3) Thin Films Using the 3-Omega Method

A well-known method for measuring thermal conductivity is the 3-Omega (3ω) method. A prerequisite for it is the deposition of a metal heater on top of the sample surface. The known design rules for the heater geometry, however, are not yet sufficient. In this work, heaters with different lengths and...

Descripción completa

Detalles Bibliográficos
Autores principales: Kühnel, Fabian, Metzke, Christoph, Weber, Jonas, Schätz, Josef, Duesberg, Georg S., Benstetter, Günther
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9182586/
https://www.ncbi.nlm.nih.gov/pubmed/35683782
http://dx.doi.org/10.3390/nano12111928

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9182586/
https://www.ncbi.nlm.nih.gov/pubmed/35683782
http://dx.doi.org/10.3390/nano12111928

Ejemplares similares