Experimental Study of the Influence of CH(4) and H(2) on the Conformation, Chemical Composition, and Luminescence of Silicon Quantum Dots Inlaid in Silicon Carbide Thin Films Grown by Remote Plasma-Enhanced Chemical Vapor Deposition

[Image: see text] Silicon carbide (SiC) has become an extraordinary photonic material. Achieving reproducible self-formation of silicon quantum dots (SiQDs) within SiC matrices could be beneficial for producing electroluminescent devices operating at high power, high temperatures, or high voltages....

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Detalles Bibliográficos
Autores principales: León-Guillén, Rodrigo, Muñoz-Rosas, Ana Luz, Arenas-Alatorre, Jesús A., Alonso-Huitrón, Juan Carlos, Pérez-Martínez, Ana Laura, Rodríguez-Gómez, Arturo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9202280/
https://www.ncbi.nlm.nih.gov/pubmed/35721970
http://dx.doi.org/10.1021/acsomega.2c01384

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9202280/
https://www.ncbi.nlm.nih.gov/pubmed/35721970
http://dx.doi.org/10.1021/acsomega.2c01384

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