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High precision robust control design of piezoelectric nanopositioning platform

The piezoelectric nanopositioning platform requires extremely accurate tracking during the task, while the model uncertainty caused by load variations requires strong robustness of the system. The high accuracy and robustness in the control design are coupled to each other, making it difficult to ac...

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Detalles Bibliográficos
Autores principales: Feng, Huan, Pang, Aiping, Zhou, Hongbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9209471/
https://www.ncbi.nlm.nih.gov/pubmed/35725755
http://dx.doi.org/10.1038/s41598-022-14332-5