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High precision robust control design of piezoelectric nanopositioning platform
The piezoelectric nanopositioning platform requires extremely accurate tracking during the task, while the model uncertainty caused by load variations requires strong robustness of the system. The high accuracy and robustness in the control design are coupled to each other, making it difficult to ac...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9209471/ https://www.ncbi.nlm.nih.gov/pubmed/35725755 http://dx.doi.org/10.1038/s41598-022-14332-5 |