A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors

A graphene membrane acts as a highly sensitive element in a nano/micro–electro–mechanical system (N/MEMS) due to its unique physical and chemical properties. Here, a novel crossbeam structure with a graphene varistor protected by Si(3)N(4) is presented for N/MEMS mechanical sensors. It substantially...

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Detalles Bibliográficos
Autores principales: Wang, Junqiang, Zhu, Zehua, Qi, Yue, Li, Mengwei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227024/
https://www.ncbi.nlm.nih.gov/pubmed/35745440
http://dx.doi.org/10.3390/nano12122101

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227024/
https://www.ncbi.nlm.nih.gov/pubmed/35745440
http://dx.doi.org/10.3390/nano12122101

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