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A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors
A graphene membrane acts as a highly sensitive element in a nano/micro–electro–mechanical system (N/MEMS) due to its unique physical and chemical properties. Here, a novel crossbeam structure with a graphene varistor protected by Si(3)N(4) is presented for N/MEMS mechanical sensors. It substantially...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9227024/ https://www.ncbi.nlm.nih.gov/pubmed/35745440 http://dx.doi.org/10.3390/nano12122101 |