Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

In this paper, a high-precision, low-cost, batch processing nanoimprint method is proposed to process a spherical microlens array (MLA). The nanoimprint mold with high surface precision and low surface roughness was fabricated by single-point diamond turning. The anti-sticking treatment of the mold...

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Detalles Bibliográficos
Autores principales: Sun, Quanquan, Tang, Jiaxuan, Shen, Lifeng, Lan, Jie, Shen, Zhenfeng, Xiao, Junfeng, Chen, Xiao, Zhang, Jianguo, Wu, Yu, Xu, Jianfeng, Wang, Xuefang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9228423/
https://www.ncbi.nlm.nih.gov/pubmed/35744513
http://dx.doi.org/10.3390/mi13060899

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9228423/
https://www.ncbi.nlm.nih.gov/pubmed/35744513
http://dx.doi.org/10.3390/mi13060899

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