Quantification of Aluminum Gallium Arsenide (AlGaAs) Wafer Plasma Using Calibration-Free Laser-Induced Breakdown Spectroscopy (CF-LIBS)

In this work, we report the results of the compositional analysis of an aluminum gallium arsenide (AlGaAs) sample using the calibration-free laser-induced breakdown spectroscopy (CF-LIBS) technique. The AlGaAs sample was doped with three various concentrations of gallium (Ga), arsenic (As), and alum...

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Detalles Bibliográficos
Autores principales: Alrebdi, Tahani A., Fayyaz, Amir, Asghar, Haroon, Zaman, Asif, Asghar, Mamoon, Alkallas, Fatemah H., Hussain, Atif, Iqbal, Javed, Khan, Wilayat
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9229630/
https://www.ncbi.nlm.nih.gov/pubmed/35744877
http://dx.doi.org/10.3390/molecules27123754

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9229630/
https://www.ncbi.nlm.nih.gov/pubmed/35744877
http://dx.doi.org/10.3390/molecules27123754

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