Cargando…
Effect of Substrate-RF on Sub-200 nm Al(0.7)Sc(0.3)N Thin Films
Sc-doped aluminum nitride is emerging as a new piezoelectric material which can substitute undoped aluminum nitride (AlN) in radio-frequency MEMS applications, thanks to its demonstrated enhancement of the piezoelectric coefficients. Furthermore, the recent demonstration of the ferroelectric-switchi...
Autores principales: | , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9230010/ https://www.ncbi.nlm.nih.gov/pubmed/35744493 http://dx.doi.org/10.3390/mi13060877 |