The direct growth of planar and vertical graphene on Si(100) via microwave plasma chemical vapor deposition: synthesis conditions effects

In the present research, graphene was synthesized directly on a Si(100) substrate via combining direct microwave plasma-enhanced chemical vapor deposition and protective enclosure. The graphene flake orientation was controlled using suitable synthesis conditions. We revealed that high processing tem...

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Detalles Bibliográficos
Autores principales: Meškinis, Š., Vasiliauskas, A., Guobienė, A., Talaikis, M., Niaura, G., Gudaitis, R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2022
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9237919/
https://www.ncbi.nlm.nih.gov/pubmed/35873323
http://dx.doi.org/10.1039/d2ra02370a

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9237919/
https://www.ncbi.nlm.nih.gov/pubmed/35873323
http://dx.doi.org/10.1039/d2ra02370a

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