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Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monol...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9256620/ https://www.ncbi.nlm.nih.gov/pubmed/35812807 http://dx.doi.org/10.1038/s41378-022-00413-y |