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Study on the Dynamic Characteristics of a SiC-Based Capacitive Micro-Accelerometer in Rarefied Air
In this study, we investigated the viscosity, squeeze-film damping, and a SiC-based capacitive micro-accelerometer in rarefied air. A specific expression for the effective viscosity coefficient of the air was derived, and when the air pressure drops from the standard atmospheric pressure, the viscos...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9267398/ https://www.ncbi.nlm.nih.gov/pubmed/35806815 http://dx.doi.org/10.3390/ma15134692 |