Impact of Helium Ion Implantation Dose and Annealing on Dense Near-Surface Layers of NV Centers

The implantation of diamonds with helium ions has become a common method to create hundreds-nanometers-thick near-surface layers of NV centers for high-sensitivity sensing and imaging applications; however, optimal implantation dose and annealing temperature are still a matter of discussion. In this...

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Detalles Bibliográficos
Autores principales: Berzins, Andris, Grube, Hugo, Sprugis, Einars, Vaivars, Guntars, Fescenko, Ilja
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9268007/
https://www.ncbi.nlm.nih.gov/pubmed/35808069
http://dx.doi.org/10.3390/nano12132234

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9268007/
https://www.ncbi.nlm.nih.gov/pubmed/35808069
http://dx.doi.org/10.3390/nano12132234

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