Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser

A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO(2) laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for press...

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Detalles Bibliográficos
Autores principales: Zhang, Hui, Li, Yi, Zhang, Zhuo, Yang, Chaoming, Liang, Mingshan, Hu, Yong, Wei, Heming, Pang, Fufei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269120/
https://www.ncbi.nlm.nih.gov/pubmed/35808196
http://dx.doi.org/10.3390/s22134700

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269120/
https://www.ncbi.nlm.nih.gov/pubmed/35808196
http://dx.doi.org/10.3390/s22134700

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