Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser

A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO(2) laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for press...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhang, Hui, Li, Yi, Zhang, Zhuo, Yang, Chaoming, Liang, Mingshan, Hu, Yong, Wei, Heming, Pang, Fufei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269120/
https://www.ncbi.nlm.nih.gov/pubmed/35808196
http://dx.doi.org/10.3390/s22134700
_version_ 1784744155218444288
author Zhang, Hui
Li, Yi
Zhang, Zhuo
Yang, Chaoming
Liang, Mingshan
Hu, Yong
Wei, Heming
Pang, Fufei
author_facet Zhang, Hui
Li, Yi
Zhang, Zhuo
Yang, Chaoming
Liang, Mingshan
Hu, Yong
Wei, Heming
Pang, Fufei
author_sort Zhang, Hui
collection PubMed
description A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO(2) laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of −2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications.
format Online
Article
Text
id pubmed-9269120
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-92691202022-07-09 Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser Zhang, Hui Li, Yi Zhang, Zhuo Yang, Chaoming Liang, Mingshan Hu, Yong Wei, Heming Pang, Fufei Sensors (Basel) Communication A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO(2) laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of −2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications. MDPI 2022-06-22 /pmc/articles/PMC9269120/ /pubmed/35808196 http://dx.doi.org/10.3390/s22134700 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Communication
Zhang, Hui
Li, Yi
Zhang, Zhuo
Yang, Chaoming
Liang, Mingshan
Hu, Yong
Wei, Heming
Pang, Fufei
Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser
title Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser
title_full Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser
title_fullStr Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser
title_full_unstemmed Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser
title_short Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser
title_sort hermetic welding of an optical fiber fabry–pérot cavity for a diaphragm-based pressure sensor using co(2) laser
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269120/
https://www.ncbi.nlm.nih.gov/pubmed/35808196
http://dx.doi.org/10.3390/s22134700
work_keys_str_mv AT zhanghui hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser
AT liyi hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser
AT zhangzhuo hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser
AT yangchaoming hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser
AT liangmingshan hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser
AT huyong hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser
AT weiheming hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser
AT pangfufei hermeticweldingofanopticalfiberfabryperotcavityforadiaphragmbasedpressuresensorusingco2laser

Ejemplares similares