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Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO(2) Laser
A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO(2) laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for press...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269120/ https://www.ncbi.nlm.nih.gov/pubmed/35808196 http://dx.doi.org/10.3390/s22134700 |