Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer

Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to...

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Detalles Bibliográficos
Autores principales: Dai, Jiefeng, Wang, Wenrui, Wu, Bin, Ye, Lingyun, Song, Kaichen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269488/
https://www.ncbi.nlm.nih.gov/pubmed/35808419
http://dx.doi.org/10.3390/s22134930

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269488/
https://www.ncbi.nlm.nih.gov/pubmed/35808419
http://dx.doi.org/10.3390/s22134930

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