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Study on the Method of Charge Accumulation Suppression of Electrostatic Suspended Accelerometer
Electrostatic suspended accelerometers (ESAs) are widely used in high accuracy acceleration measurement. However, there exist accumulated charges on the isolated mass which damage the accuracy and the stability of ESAs. In this paper, we propose to apply actuation voltage with a combined waveform to...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269488/ https://www.ncbi.nlm.nih.gov/pubmed/35808419 http://dx.doi.org/10.3390/s22134930 |