Depth profiling of Cr-ITO dual-layer sample with secondary ion mass spectrometry using MeV ions in the low energy region

This work explores the possibility of depth profiling of inorganic materials with Megaelectron Volt Secondary Ion Mass Spectrometry using low energy primary ions (LE MeV SIMS), specifically 555 keV Cu(2+), while etching the surface with 1 keV Ar(+) ions. This is demonstrated on a dual-layer sample c...

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Detalles Bibliográficos
Autores principales: Barac, Marko, Brajković, Marko, Siketić, Zdravko, Ekar, Jernej, Bogdanović Radović, Iva, Šrut Rakić, Iva, Kovač, Janez
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9270474/
https://www.ncbi.nlm.nih.gov/pubmed/35804184
http://dx.doi.org/10.1038/s41598-022-16042-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9270474/
https://www.ncbi.nlm.nih.gov/pubmed/35804184
http://dx.doi.org/10.1038/s41598-022-16042-4

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