A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelerometers with a TGV process, which can reduce the ma...

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Detalles Bibliográficos
Autores principales: Fu, Yingchun, Han, Guowei, Gu, Jiebin, Zhao, Yongmei, Ning, Jin, Wei, Zhenyu, Yang, Fuhua, Si, Chaowei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9316276/
https://www.ncbi.nlm.nih.gov/pubmed/35888888
http://dx.doi.org/10.3390/mi13071071

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9316276/
https://www.ncbi.nlm.nih.gov/pubmed/35888888
http://dx.doi.org/10.3390/mi13071071

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