Investigation of Combinatorial WO(3)-MoO(3) Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models

Reactive (Ar-O(2) plasma) magnetron sputtered WO(3)-MoO(3) (nanometer scaled) mixed layers were investigated and mapped by Spectroscopic Ellipsometry (SE). The W- and Mo-targets were placed separately, and 30 × 30 cm glass substrates were slowly moved under the two (W and Mo) separated targets. We u...

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Detalles Bibliográficos
Autores principales: Fried, Miklos, Bogar, Renato, Takacs, Daniel, Labadi, Zoltan, Horvath, Zsolt Endre, Zolnai, Zsolt
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9317069/
https://www.ncbi.nlm.nih.gov/pubmed/35889645
http://dx.doi.org/10.3390/nano12142421

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9317069/
https://www.ncbi.nlm.nih.gov/pubmed/35889645
http://dx.doi.org/10.3390/nano12142421

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