Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

Tungsten-rhenium thin film thermocouples (TFTCs) are well suited for the surface temperature monitoring of hot components due to their small size, rapid response and low cost. In this study, a tungsten-rhenium TFTC with SiC protective film on all parts except the pads was fabricated by a microelectr...

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Detalles Bibliográficos
Autores principales: Ruan, Yong, Xue, Meixia, Teng, Jiao, Wu, Yu, Shi, Meng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9317371/
https://www.ncbi.nlm.nih.gov/pubmed/35888538
http://dx.doi.org/10.3390/ma15145071

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9317371/
https://www.ncbi.nlm.nih.gov/pubmed/35888538
http://dx.doi.org/10.3390/ma15145071

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