High-Frequency and Spectrum-Clean Shear-Horizontal Acoustic Wave Resonators with AlN Overlay

By bonding the sub-wavelength-thick lithium niobate (LiNbO(3)) layer to high-phase-velocity (v(p)) substrates, such as Si, the shear-horizontal (SH) modes no longer couple with the bulk modes leaking into substrates. As the propagation loss is no longer the major concern for these types of nonleaky...

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Detalles Bibliográficos
Autores principales: Wu, Zonglin, Wu, Shuxian, Bao, Feihong, Zou, Jie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319437/
https://www.ncbi.nlm.nih.gov/pubmed/35888846
http://dx.doi.org/10.3390/mi13071029

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319437/
https://www.ncbi.nlm.nih.gov/pubmed/35888846
http://dx.doi.org/10.3390/mi13071029

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