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High-Frequency and Spectrum-Clean Shear-Horizontal Acoustic Wave Resonators with AlN Overlay
By bonding the sub-wavelength-thick lithium niobate (LiNbO(3)) layer to high-phase-velocity (v(p)) substrates, such as Si, the shear-horizontal (SH) modes no longer couple with the bulk modes leaking into substrates. As the propagation loss is no longer the major concern for these types of nonleaky...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319437/ https://www.ncbi.nlm.nih.gov/pubmed/35888846 http://dx.doi.org/10.3390/mi13071029 |