Multiscale Dense U-Net: A Fast Correction Method for Thermal Drift Artifacts in Laboratory NanoCT Scans of Semi-Conductor Chips

The resolution of 3D structure reconstructed by laboratory nanoCT is often affected by changes in ambient temperature. Although correction methods based on projection alignment have been widely used, they are time-consuming and complex. Especially in piecewise samples (e.g., chips), the existing met...

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Detalles Bibliográficos
Autores principales: Liu, Mengnan, Han, Yu, Xi, Xiaoqi, Zhu, Linlin, Yang, Shuangzhan, Tan, Siyu, Chen, Jian, Li, Lei, Yan, Bin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319506/
https://www.ncbi.nlm.nih.gov/pubmed/35885192
http://dx.doi.org/10.3390/e24070967

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319506/
https://www.ncbi.nlm.nih.gov/pubmed/35885192
http://dx.doi.org/10.3390/e24070967

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