A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes

MEMS gyroscopes play an important role in inertial navigation measurements, which mainly works in n = 2 mode. However, mode matching is the basis for high-precision detection, which can improve the sensitivity, resolution, and signal-to-noise ratio of the gyroscopes. An initial frequency split is in...

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Detalles Bibliográficos
Autores principales: Chen, Chuanfu, Wu, Kai, Lu, Kuo, Li, Qingsong, Wang, Chengxiang, Wu, Xuezhong, Wang, Beizhen, Xiao, Dingbang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319629/
https://www.ncbi.nlm.nih.gov/pubmed/35888867
http://dx.doi.org/10.3390/mi13071052

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319629/
https://www.ncbi.nlm.nih.gov/pubmed/35888867
http://dx.doi.org/10.3390/mi13071052

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