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A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes
MEMS gyroscopes play an important role in inertial navigation measurements, which mainly works in n = 2 mode. However, mode matching is the basis for high-precision detection, which can improve the sensitivity, resolution, and signal-to-noise ratio of the gyroscopes. An initial frequency split is in...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319629/ https://www.ncbi.nlm.nih.gov/pubmed/35888867 http://dx.doi.org/10.3390/mi13071052 |