A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays

With the development of virtual reality/augmented reality (VR/AR) display devices, the conventional fine metal mask is limited by the wet etch process, which no longer meets the demand for high pixels per inch (PPI) displays. We deposited a layer of magnetic metal on the silicon substrate by physica...

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Detalles Bibliográficos
Autores principales: Chen, Lin, Wang, Xiuxia, Wei, Yu, Zhou, Chenggang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9320614/
https://www.ncbi.nlm.nih.gov/pubmed/35888814
http://dx.doi.org/10.3390/mi13070997

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9320614/
https://www.ncbi.nlm.nih.gov/pubmed/35888814
http://dx.doi.org/10.3390/mi13070997

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