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Nonlinear Effects of Pulsed Ion Beam in Ultra-High Resolution Material Removal

Ion beam sputtering is widely utilized in the area of ultra-high precision fabrication, coating, and discovering the microworld. A pulsed ion beam (PIB) can achieve higher material removal resolution while maintaining traditional ion beam removal performance and macro removal efficiency. In this pap...

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Detalles Bibliográficos
Autores principales:	Xie, Lingbo, Tian, Ye, Shi, Feng, Song, Ci, Tie, Guipeng, Zhou, Gang, Shao, Jianda, Liu, Shijie
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9321010/ https://www.ncbi.nlm.nih.gov/pubmed/35888914 http://dx.doi.org/10.3390/mi13071097

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