Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10(6), with a waveg...

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Detalles Bibliográficos
Autores principales: Zeng, Desheng, Liu, Qiang, Mei, Chenyang, Li, Hongwei, Huang, Qingzhong, Zhang, Xinliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9322067/
https://www.ncbi.nlm.nih.gov/pubmed/35888971
http://dx.doi.org/10.3390/mi13071155

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9322067/
https://www.ncbi.nlm.nih.gov/pubmed/35888971
http://dx.doi.org/10.3390/mi13071155

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