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Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics
A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10(6), with a waveg...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9322067/ https://www.ncbi.nlm.nih.gov/pubmed/35888971 http://dx.doi.org/10.3390/mi13071155 |