Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications

With the constant need for the development of smart devices, Micro-Electro-Mechanical Systems (MEMS) based smart sensors have been developed to detect hazard materials, micro-particles or even toxic substances. Identifying small particles using such micro-engineering technology requires designing se...

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Detalles Bibliográficos
Autores principales: Alneamy, Ayman M., Ouakad, Hassen M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9323115/
https://www.ncbi.nlm.nih.gov/pubmed/35888806
http://dx.doi.org/10.3390/mi13070989

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9323115/
https://www.ncbi.nlm.nih.gov/pubmed/35888806
http://dx.doi.org/10.3390/mi13070989

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