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Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications
With the constant need for the development of smart devices, Micro-Electro-Mechanical Systems (MEMS) based smart sensors have been developed to detect hazard materials, micro-particles or even toxic substances. Identifying small particles using such micro-engineering technology requires designing se...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9323115/ https://www.ncbi.nlm.nih.gov/pubmed/35888806 http://dx.doi.org/10.3390/mi13070989 |