Vertical and Lateral Etch Survey of Ferroelectric AlN/Al(1−x)Sc(x)N in Aqueous KOH Solutions

Due to their favorable electromechanical properties, such as high sound velocity, low dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and Aluminum Scandium Nitride (Al(1−x)Sc(x)N) thin films have achieved widespread application in radio frequency (RF) acoustic dev...

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Detalles Bibliográficos
Autores principales: Tang, Zichen, Esteves, Giovanni, Zheng, Jeffrey, Olsson, Roy H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9324062/
https://www.ncbi.nlm.nih.gov/pubmed/35888883
http://dx.doi.org/10.3390/mi13071066

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9324062/
https://www.ncbi.nlm.nih.gov/pubmed/35888883
http://dx.doi.org/10.3390/mi13071066

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