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Vertical and Lateral Etch Survey of Ferroelectric AlN/Al(1−x)Sc(x)N in Aqueous KOH Solutions

Due to their favorable electromechanical properties, such as high sound velocity, low dielectric permittivity and high electromechanical coupling, Aluminum Nitride (AlN) and Aluminum Scandium Nitride (Al(1−x)Sc(x)N) thin films have achieved widespread application in radio frequency (RF) acoustic dev...

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Detalles Bibliográficos
Autores principales:	Tang, Zichen, Esteves, Giovanni, Zheng, Jeffrey, Olsson, Roy H.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9324062/ https://www.ncbi.nlm.nih.gov/pubmed/35888883 http://dx.doi.org/10.3390/mi13071066

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