Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror

Blazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800–2500 nm has been designed and fabricated. B...

Descripción completa

Detalles Bibliográficos
Autores principales: Zha, Sinong, Li, Dongling, Wen, Quan, Zhou, Ying, Zhang, Haomiao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9325060/
https://www.ncbi.nlm.nih.gov/pubmed/35888817
http://dx.doi.org/10.3390/mi13071000

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9325060/
https://www.ncbi.nlm.nih.gov/pubmed/35888817
http://dx.doi.org/10.3390/mi13071000

Ejemplares similares