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Towards Reliable Parameter Extraction in MEMS Final Module Testing Using Bayesian Inference

In micro-electro-mechanical systems (MEMS) testing high overall precision and reliability are essential. Due to the additional requirement of runtime efficiency, machine learning methods have been investigated in recent years. However, these methods are often associated with inherent challenges conc...

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Detalles Bibliográficos
Autores principales: Heringhaus, Monika E., Zhang, Yi, Zimmermann, André, Mikelsons, Lars
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9325251/
https://www.ncbi.nlm.nih.gov/pubmed/35891087
http://dx.doi.org/10.3390/s22145408