Towards Portable MEMS Oscillators for Sensing Nanoparticles

This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approximately 5.999 MHz are employed for sensing 50 nm si...

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Detalles Bibliográficos
Autores principales: Chellasivalingam, Malar, Zielinski, Arthur T., Whitney, Thomas S., Boies, Adam M., Seshia, Ashwin A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330167/
https://www.ncbi.nlm.nih.gov/pubmed/35897988
http://dx.doi.org/10.3390/s22155485

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330167/
https://www.ncbi.nlm.nih.gov/pubmed/35897988
http://dx.doi.org/10.3390/s22155485

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