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Towards Portable MEMS Oscillators for Sensing Nanoparticles

This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approximately 5.999 MHz are employed for sensing 50 nm si...

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Detalles Bibliográficos
Autores principales:	Chellasivalingam, Malar, Zielinski, Arthur T., Whitney, Thomas S., Boies, Adam M., Seshia, Ashwin A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330167/ https://www.ncbi.nlm.nih.gov/pubmed/35897988 http://dx.doi.org/10.3390/s22155485

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