Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is rep...

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Detalles Bibliográficos
Autores principales: Kim, Si-jun, Lee, Sang-ho, You, Ye-bin, Lee, Young-seok, Seong, In-ho, Cho, Chul-hee, Lee, Jang-jae, You, Shin-jae
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9331997/
https://www.ncbi.nlm.nih.gov/pubmed/35897990
http://dx.doi.org/10.3390/s22155487

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9331997/
https://www.ncbi.nlm.nih.gov/pubmed/35897990
http://dx.doi.org/10.3390/s22155487

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