W-Band 4th Order Waveguide Filter Based on Double Layer SU8 Microfabrication

This paper investigates the fabrication accuracy of the W-band SU-8 photoresist micromachined 4th order waveguide bandpass filters (BPF). The designed filter based on cylindrical resonators is excited in TM(010) mode. It is ideally suitable for the layered SU-8 micromachining process as the height o...

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Detalles Bibliográficos
Autores principales: Liu, Min, Yang, Qian, Zhang, Anxue, Guo, Cheng, Chen, Juan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9332807/
https://www.ncbi.nlm.nih.gov/pubmed/35898107
http://dx.doi.org/10.3390/s22155604

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9332807/
https://www.ncbi.nlm.nih.gov/pubmed/35898107
http://dx.doi.org/10.3390/s22155604

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