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W-Band 4th Order Waveguide Filter Based on Double Layer SU8 Microfabrication
This paper investigates the fabrication accuracy of the W-band SU-8 photoresist micromachined 4th order waveguide bandpass filters (BPF). The designed filter based on cylindrical resonators is excited in TM(010) mode. It is ideally suitable for the layered SU-8 micromachining process as the height o...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9332807/ https://www.ncbi.nlm.nih.gov/pubmed/35898107 http://dx.doi.org/10.3390/s22155604 |