Cellular shape micromachined actuator ribbons

This work presents a new class of micromachined electrostatic actuators capable of producing output force and displacement unprecedented for MEMS electrostatic actuators. The actuators feature submicron high aspect ratio transduction gaps lined up in two-dimensional arrays. Such an arrangement of mi...

Descripción completa

Detalles Bibliográficos
Autores principales: Abbasalipour, Amin, Palit, Prithviraj, Sheikhlari, Sepehr, Pakdelian, Siavash, Pourkamali, Siavash
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9345908/
https://www.ncbi.nlm.nih.gov/pubmed/35935275
http://dx.doi.org/10.1038/s41378-022-00421-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9345908/
https://www.ncbi.nlm.nih.gov/pubmed/35935275
http://dx.doi.org/10.1038/s41378-022-00421-y

Ejemplares similares