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Cellular shape micromachined actuator ribbons
This work presents a new class of micromachined electrostatic actuators capable of producing output force and displacement unprecedented for MEMS electrostatic actuators. The actuators feature submicron high aspect ratio transduction gaps lined up in two-dimensional arrays. Such an arrangement of mi...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9345908/ https://www.ncbi.nlm.nih.gov/pubmed/35935275 http://dx.doi.org/10.1038/s41378-022-00421-y |