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Micromachining of Alumina Using a High-Power Ultrashort-Pulsed Laser

We report on a comprehensive study of laser ablation and micromachining of alumina using a high-power 1030 nm ultrashort-pulsed laser. By varying laser power up to 150 W, pulse duration between 900 fs and 10 ps, repetition rates between 200 kHz and 800 kHz), spatial pulse overlap between 70% and 80%...

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Detalles Bibliográficos
Autores principales: Rung, Stefan, Häcker, Niklas, Hellmann, Ralf
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9369604/
https://www.ncbi.nlm.nih.gov/pubmed/35955261
http://dx.doi.org/10.3390/ma15155328